Contact htt
Back to top
Close Menu

QES Mechatronic Sdn. Bhd. - WIS1000

Microscopy based wafer inspection system integrated with wafer autoloader, macro front and back inspection and micro-inspection with multiple objective lenses and selectable illumination technique like bright-field, dark-field and normaski interference contrast. 

Key Features:

- Designed for 6" and 8" wafer inspection.

- Automatic wafer loading and unloading with OCR reader.

- Programmable XY stages with point-and-shoot wafer alignment algorithms.

- Wafer Mapping and simple defect classification.

- Anti-vibration platform ensuring good images during micro inspection.

- Ergonomic design based on SEMI S2/S8 requirement.

- Optional Inking module for Reject Identification

- Optional SECS/GEM communication for wafer map and recipe transfer

Download Datasheet
Direct Contact

QES Mechatronic Sdn. Bhd. - WIS1000

By clicking on the video, you agree that your data will be transmitted to YouTube and that you have read the privacy policy.