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Mechatronic - mBWR200


Notch-Alignment and Wafer ID Reading for 8” wafers in one tool

Very fast cycle times for ID Reading - 35 sec./25 slot
WID110 Advanced Wafer ID Reader integrated
Front- and Backside reading function
Wafer Mapping function
Additional Notch-Alignment after ID Reading
Cleaning function
RFID function for Front- and Backside
SECS/Gem Interface
Compact design for tabletop use
User friendly SEMI standard GUI
ISO class 3 (former FS209E cleanroom class 1)
CE and FCC certificated

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