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Cyberoptics Semiconductor - ReticleSense® Airborne Particle Sensor APSRQ


Speed equipment qualification with wireless measurements.

Shorten equipment maintenance cycles with reticle-like form factor.

Lower equipment expenses with objective and reproducible data.

Reticle-shaped: Also available in 150mm, 200mm and 300mm wafer sizes.

Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.

Wireless: Transmits data to your laptop of PC in real-time.

Easy-to-use software: ParticleSpectrum application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.


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