MSP - Nano Silica

- Extremely uniform size distribution

- Peak diameter measured with NIST traceability

- Stable when subjected to intense DUV or EUV radiation

- High particle concentration

- Easily detect and measure peak diameter with your particle deposition tool, inspection tool, or
analytical instrument

- Avoid discrepancies due to differences between mean and peak diameter values

- Prepare working suspensions suitable for aerosol generation devices with relatively high or low
efficiencies

- Create long-lasting calibration standards for state-of-the-art inspection tools

- Consume less material; save money