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- ION12

The ION12 is a single wafer system which provides higher productivity, improved reliability and process performance with 12 process spin chamber configuration, enabling a high throughput of 540 wafers per an hour.

ION12 offers individual process in each of the 6 chambers with the separated chemical supply design.

- 12 chambers triple decker
- Minimized chamber design
- Separated drain and exhaust by chemical
- Cup cleaning function
- Uniform flow control for process stabilization

- Cleaning in FEOL or BEOL

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