3S Korea - 300mm FOSB
3S Korea has enabled to respond a single model of FOSB to chipmaker for the first time in Korea.
Developed as a proprietary product, it is now being delivered to domestic chip maker. Except
for some special process line, our FOSB can mostly cope with auto and manual machine. In addition, top flange for OHT (overhead hoist transporter) is available as an option.
Specification:
Wafer storage quantity: 25 sheets
Width: 387.3mm
Length: 344.5mm
Height: 328mm
Weight: empty - 4.2kg / with wafer - 7.2kg
Product compatibility:
Secure compatibility of facility based on SEMI (E15.1, E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.
Developed as a proprietary product, it is now being delivered to domestic chip maker. Except
for some special process line, our FOSB can mostly cope with auto and manual machine. In addition, top flange for OHT (overhead hoist transporter) is available as an option.
Specification:
Wafer storage quantity: 25 sheets
Width: 387.3mm
Length: 344.5mm
Height: 328mm
Weight: empty - 4.2kg / with wafer - 7.2kg
Product compatibility:
Secure compatibility of facility based on SEMI (E15.1, E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.
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