H-Square - MCF Process Aluminum Cassettes
A special application all-aluminum metal cassette used in place of a plastic cassette in load-locks, OEM applications and advanced wafer handling applications. Finish coating is electroless nickel (EN) or bare polished aluminum (HV) with vacuum vented screws. Designed for ISO Class 3
(FS209E Class 1). Thermal environments up to 350° C"
(FS209E Class 1). Thermal environments up to 350° C"
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