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Home | Suppliers | Cyberoptics Semiconductor

Cyberoptics Semiconductor


CyberOptics provides wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.
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Cyberoptics Semiconductor


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Cyberoptics Semiconductor
AVLS3 Auto Vibration and Leveling Sensor
WaferSense® Auto Vibration and Leveling Sensor
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Cyberoptics Semiconductor
WaferSense® Auto Resistance Sensor™ (ARS)
Real time resistance measurement of plating cell contacts.
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Cyberoptics Semiconductor
APSRQ ReticleSense® Airborne Particle Sensor
Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.
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Cyberoptics Semiconductor
EX-Q
Wafer Mapping Sensors
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Cyberoptics Semiconductor
EXQS
Wafer Mapping Sensors
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Cyberoptics Semiconductor
In- line Particle Sensor™ (IPS™)
24/7 detection of small particles in gas and vacuum lines.
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Cyberoptics Semiconductor
ReticleSense® Airborne Particle Sensor APSR
Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.
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Cyberoptics Semiconductor
ReticleSense® Auto Multi Sensor™ AMSR
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
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Cyberoptics Semiconductor
ReticleSense® Auto Teaching System™ (ATSR)
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Cyberoptics Semiconductor
SQ 3000 AOI
High Precision Accuracy with Multi-Reflection Suppression (MRS) Sensor Technology
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Cyberoptics Semiconductor
WaferSense® Airborne Particle Sensor™ APS3
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
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Cyberoptics Semiconductor
WaferSense® Auto Gapping System AGS
Improve Uniformity and Yield with WaferSense AGS for Accurate and Repeatable Setups
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Cyberoptics Semiconductor
WaferSense® Auto Leveling System 2 Vertical™ (ALS/ALS2V)
Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations. Quickly and accurately set the same level across tools for better process uniformity.
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Cyberoptics Semiconductor
WaferSense® Auto Multi Sensor™ AMS
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
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Cyberoptics Semiconductor
WaferSense® Auto Teaching System™ 2 (ATS2)
Auto Teaching Sensor ATS2
On-board image processor reports x-y-z offset from the teaching wafer to a target inside the equipment so you can teach wafer transfer coordinates.
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Cyberoptics Semiconductor
WaferSense® Auto Vibration and Leveling Sensor™ AVLS3
Speed simultaneous vibration and leveling measurements.
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Cyberoptics Semiconductor
WaferSense® Auto Vibration System AVS
Speed monitoring 3-axis accelerations and vibration to reduce particles, maintenance time and cycle time.