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Cyberoptics Semiconductor - In- line Particle Sensor™ (IPS™)


Real Time 24/7 Monitoring

Based on our WaferSense® Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum lines in semiconductor process equipment.

- Speed equipment qualification with real-time 24/7 monitoring

- Shorten equipment maintenance cycles with inline particle sensing

- Lower equipment expenses with objective and reproducible data



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