Nordson Test & Inspection - ReticleSense® Auto Teaching System™ (ATSR)
Improve equipment set-up and long term yields by wirelessly capturing three dimensional off-set data (x, y and z) in real-time to quickly teach reticle transfer positions for proper alignment and set-up of semiconductor tools.
Benefits:
- Improve yields and lower particulate contamination with accurate reticle handoff calibration.
Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves
through your semiconductor equipment. Improve the yield of your manufacturing process with p
properly calibrated equipment.
- Achieve repeatable and reproducible semiconductor equipment setups.
Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable
and reproducible setup and maintenance checks.
- Reduce equipment downtime from hours to minutes.
Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to
remain sealed during inspection. Increase equipment availability while reducing manpower and
consumable expense.
- Speed troubleshooting and lower consumable expense with visual inspection.
Improve yields and lower particulate contamination with accurate reticle handoff calibration.
Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves
through your semiconductor equipment. Improve the yield of your manufacturing process with
properly calibrated equipment. Achieve repeatable and reproducible semiconductor equipment
setups. Eliminate technician-to-technician variation with the ATSR calibration that enables
repeatable and reproducible setup and maintenance checks. Reduce equipment downtime from
hours to minutes. Save time troubleshooting as the wireless and vacuum compatible ATSR allows
equipment to remain sealed during inspection. Increase equipment availability while reducing
manpower and consumable expense. Speed troubleshooting and lower consumable expense with
visual inspection. Receive real-time images as robots move ATSR through the tool. New
CyberSpectrum™ software graphical user interface provides x, y and z offsets that eliminate
guesswork. Search for lost wafers and pedestal debris without opening the tool.
Benefits:
- Improve yields and lower particulate contamination with accurate reticle handoff calibration.
Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves
through your semiconductor equipment. Improve the yield of your manufacturing process with p
properly calibrated equipment.
- Achieve repeatable and reproducible semiconductor equipment setups.
Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable
and reproducible setup and maintenance checks.
- Reduce equipment downtime from hours to minutes.
Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to
remain sealed during inspection. Increase equipment availability while reducing manpower and
consumable expense.
- Speed troubleshooting and lower consumable expense with visual inspection.
Improve yields and lower particulate contamination with accurate reticle handoff calibration.
Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves
through your semiconductor equipment. Improve the yield of your manufacturing process with
properly calibrated equipment. Achieve repeatable and reproducible semiconductor equipment
setups. Eliminate technician-to-technician variation with the ATSR calibration that enables
repeatable and reproducible setup and maintenance checks. Reduce equipment downtime from
hours to minutes. Save time troubleshooting as the wireless and vacuum compatible ATSR allows
equipment to remain sealed during inspection. Increase equipment availability while reducing
manpower and consumable expense. Speed troubleshooting and lower consumable expense with
visual inspection. Receive real-time images as robots move ATSR through the tool. New
CyberSpectrum™ software graphical user interface provides x, y and z offsets that eliminate
guesswork. Search for lost wafers and pedestal debris without opening the tool.
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Nordson Test & Inspection - ReticleSense® Auto Teaching System™ (ATSR)
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