Quartet Mechanics - Edge Grip Aligner 300mm Thin Wafer
Bernoulli/vortex aided robot end effector and aligner for 12" opaque and transparent thin/Taiko wafer. Non-contact edge grip with SoftTouch mechanism. Works with 3-6 axis robots or tool host via Ethernet communication. Optional top pick/flipping...
50-0133-300V Edge Grip/Vortex-Aided End Effector
- For 300mm Thin/Taiko Wafer
- For 300mm Opaque/Transparent Wafer
- SoftTouch Mechanism
- Optional Top Approach & Flipping
50-0238 Edge Grip/Vortex Support Chuck Aligner
- For 300mm Thin/Taiko Wafer
- For 300mm Opaque/Transparent Wafer
- SoftTouch Mechanism
- ±25μm/0.02° Repeatability
- Maximum ±1.5mm Off-Center Displacement Allowed
- Drop-in Replace Brooks/PRI or Asyst
50-0120-02EP Flipper with Absolute Encoder
8 Electrical wires ad 1 Air/Vacuum Line
50-0133-300V Edge Grip/Vortex-Aided End Effector
- For 300mm Thin/Taiko Wafer
- For 300mm Opaque/Transparent Wafer
- SoftTouch Mechanism
- Optional Top Approach & Flipping
50-0238 Edge Grip/Vortex Support Chuck Aligner
- For 300mm Thin/Taiko Wafer
- For 300mm Opaque/Transparent Wafer
- SoftTouch Mechanism
- ±25μm/0.02° Repeatability
- Maximum ±1.5mm Off-Center Displacement Allowed
- Drop-in Replace Brooks/PRI or Asyst
50-0120-02EP Flipper with Absolute Encoder
8 Electrical wires ad 1 Air/Vacuum Line
Direct Contact
