Jenoptik - UFO Probe® CANTILEVER + OPTICAL

Jenoptik developed an opto-electronic probe card for wafer level testing of photonic integrated circuits (PIC) with vertical coupling mechanism (e.g. grating couplers). The probe card simultaneously contacts optical and electrical interfaces of the PIC. Due to the alignment insensitive optical concept and by integration together with HTT’s cantilever probes, the probe card works with common high-volume wafer probers and automated test equipment without the need for active alignment. The novel optical module, as a core component, can be adapted to an arbitrary PIC layout.