Nordson Test & Inspection - EX-Q
The EX-Q Wafer Mapping Sensor - A Dramatic Step Forward in Wafer Detection.
Our EX-Q wafer mapping sensor offers quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. This off-the-shelf sensor has ample detection headroom (sensitivity) allowing it to easily detect thin and dark-coated wafers of any size. It also has no moving parts that could result in particulate contamination.
EX-Q is available in four standoff distances: 1.5", 2.2", 3.0" and 4.5".
Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.
Insensitive to interference from the mapping environment including stray reflections.
Easy-to-use, off-the-shelf direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.
Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.
No moving parts that can result in particulate contamination.
Detects cross-slotted and ultra-thin wafers.
Note: Connector is an option and must be specified when ordered.
Our EX-Q wafer mapping sensor offers quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. This off-the-shelf sensor has ample detection headroom (sensitivity) allowing it to easily detect thin and dark-coated wafers of any size. It also has no moving parts that could result in particulate contamination.
EX-Q is available in four standoff distances: 1.5", 2.2", 3.0" and 4.5".
Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.
Insensitive to interference from the mapping environment including stray reflections.
Easy-to-use, off-the-shelf direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.
Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.
No moving parts that can result in particulate contamination.
Detects cross-slotted and ultra-thin wafers.
Note: Connector is an option and must be specified when ordered.
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