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QES Mechatronic Sdn. Bhd. - Wafer Sorting System - WHS2200B


Designed for wafer sorting between cassettes. Use of Hirata Dual Arm ATM Robot with 4 load ports design. Accept 6" & 8" Open Cassettes. Integrated with Wafer Alignment and OCR reader module.

Key Features:

- For 6" & 8" Wafers

- Various sorting method and customization according to requirement.

- 4x universal Load ports for 6" and 8" open cassette without conversion.

- Cassette Slot Mapping function integrated.

- Wafer Notch and OF Alignment module.

- IOSS OCR Reader.

- SECS/GEM interface for mapping & recipe file transfer host computer.

- Wafer flipping option for thin and thick/heavy Wafer material

- Edge Grip including Flipping available

- Edge Grip Aligner available


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QES Mechatronic Sdn. Bhd. - Wafer Sorting System - WHS2200B

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