3S Korea - 300mm OPEN CASSETTE
Open Cassette is a carrier box used for moving lines and lines during the wafer manufacturing process.
Open Cassette is designed as open structure to ensure ease of cleaning. It has excellent dimensional accuracy, impact resistance and low distortion.
Besides,our open cassette raw material is Super Engineering grade polymer with high performance properties such as high chemical resistance,
heat resistance and dimensional stability, and it is suitable for the process environment of wafer manufacturer that requires heat resistance.
Specification:
Wafer storage quantity: 25 sheets
Width: 332mm
Length: 310mm
Height: 303mm
Weight: empty - 2.2kg / with wafer - 5.2kg
Product compatibility:
Secure compatibility of facility based on SEMI (E15.1,
E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.
Open Cassette is designed as open structure to ensure ease of cleaning. It has excellent dimensional accuracy, impact resistance and low distortion.
Besides,our open cassette raw material is Super Engineering grade polymer with high performance properties such as high chemical resistance,
heat resistance and dimensional stability, and it is suitable for the process environment of wafer manufacturer that requires heat resistance.
Specification:
Wafer storage quantity: 25 sheets
Width: 332mm
Length: 310mm
Height: 303mm
Weight: empty - 2.2kg / with wafer - 5.2kg
Product compatibility:
Secure compatibility of facility based on SEMI (E15.1,
E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.
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