QES Mechatronic Sdn. Bhd. - WIS1000
Microscopy based wafer inspection system integrated with wafer autoloader, macro front and back inspection and micro-inspection with multiple objective lenses and selectable illumination technique like bright-field, dark-field and normaski interference contrast.
Key Features:
- Designed for 6" and 8" wafer inspection.
- Automatic wafer loading and unloading with OCR reader.
- Programmable XY stages with point-and-shoot wafer alignment algorithms.
- Wafer Mapping and simple defect classification.
- Anti-vibration platform ensuring good images during micro inspection.
- Ergonomic design based on SEMI S2/S8 requirement.
- Optional Inking module for Reject Identification
- Optional SECS/GEM communication for wafer map and recipe transfer
Key Features:
- Designed for 6" and 8" wafer inspection.
- Automatic wafer loading and unloading with OCR reader.
- Programmable XY stages with point-and-shoot wafer alignment algorithms.
- Wafer Mapping and simple defect classification.
- Anti-vibration platform ensuring good images during micro inspection.
- Ergonomic design based on SEMI S2/S8 requirement.
- Optional Inking module for Reject Identification
- Optional SECS/GEM communication for wafer map and recipe transfer
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QES Mechatronic Sdn. Bhd. - WIS1000
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