QES Mechatronic Sdn. Bhd. - PPI3300 POST PROBING INSPECTION SYSTEM

Key Features:

- Designed for 8”& 12”Wafer Macro Inspection
- 1x HIRATA FOUP port with 8”OC. (Class 1 –Cleanliness)
- HIRATA Dual arm ATM robot For High Throughput. (Class 1 –Cleanliness)
- HIRATA Wafer Pre-aligner. (Class 1 –Cleanliness)
- IOSS High Performance OCR Reader
- 3-axis wafer chuck for Wafer Macro frontside Inspection
- Back-Flip arm for Wafer Macro backside inspection
- 26.2MP Area-Scan ColorCamera with 4K Zoom Lens
- Green Panel Lighting
- Throughput 200 WPH for Macro Inspection
- HIRATAS MIF Pod Opener. (OPTIONAL) * can add up to 2 port
- Brightfield/Darkfield lighting. (OPTIONAL)
- 8” Wafer Micro Inspection Station. (OPTIONAL)
- HEPA or ULPA FFU. (OPTIONAL)
- TCP-IP & RS232 Data Interfaces/ SECS/GEM Data Communication (OPTIONAL)